Time (days) Oxide Layer (nm) Zn3N2 Layer (nm) Oxide Layer (nm) Zn3N2 Layer (nm) Oxide Layer (nm) Zn3N2 Layer (nm) Oxide Layer (nm) Zn3N2 Layer (nm) Oxide Layer (nm) Zn3N2 Layer (nm) Oxide Layer (nm) Zn3N2 Layer (nm) As Deposited As Deposited 200 °C 200 °C 250 °C 250 °C 300 °C 300 °C 350 °C 350 °C 400 °C 400 °C 1 7.61 76.12 8.19 74.86 7.07 75.01 9.29 73.17 8.46 73.76 6.04 76.48 1.99861 41.23 57.73 13.51 72.87 8.67 75.95 11.06 72.36 9.73 72.13 7.41 74.44 2.96667 111.69 1.52 17.35 70.26 10.54 75.03 11.45 71.99 9.71 73.23 7.56 74.34 6.98542 108.59 0.47 88.53 31.45 12.11 75.05 12 72.14 9.83 72.95 6.91 75.35 8.97222 114.35 0.04 114.18 15.24 11.3 74.69 12.39 71.75 10.13 73.14 7.54 74.75 11.15417 113.35 0.05 116.06 8.38 12.36 73.01 12.27 71.93 9.87 73.09 7.79 74.38 18.11181 117 0 126.08 0.2 68.06 36.53 13.05 71.7 10.24 73.16 8.29 73.81 45.09375 113.32 0 123.94 0 125.27 0.18 16.79 69.52 10.6 72.55 8.84 73.17 80.10972 107.77 0 123.53 0 125.83 0.04 25.76 63.42 11.01 72.12 8.22 73.7 120.10278 107.85 0 124.21 0 125.33 0.62 48.79 51.5 11.6 71.7 10.35 72.16 155.10556 111.55 0 123.76 0 126.27 0 74.18 36.34 11.96 71.58 9.61 72.6 227.52708 109.69 0.16 121.94 0 126.16 0.29 106.86 5.96 13.08 70.8 11.9 70.71 286.52708 112.47 0.3 123.5 0 128.45 0.02 110.77 4.08 14.44 69.69 14.03 69.27 682.52708 114.35 0.52 124.96 0 130.16 0.07 111.56 3.12 27.03 59.97 50.44 38.11