2theta (°)	Intensity (cps)	Intensity (cps)	Intensity (cps)	Intensity (cps)
	As deposited	200 °C	300 °C	400 °C
30	86	81	77	83
30.1	82	99	94	91
30.1999	98	102	83	88
30.2999	97	101	90	86
30.3999	73	99	93	85
30.4998	104	82	98	81
30.5998	86	92	101	81
30.6998	89	100	91	81
30.7997	82	101	93	93
30.8997	77	105	92	89
30.9996	96	92	111	91
31.0996	90	100	105	90
31.1996	90	79	85	69
31.2995	108	104	82	77
31.3995	92	111	104	88
31.4995	100	90	110	91
31.5994	92	116	102	86
31.6994	92	112	101	69
31.7994	99	120	85	102
31.8993	91	101	110	106
31.9993	102	113	110	97
32.0993	117	104	86	85
32.1992	91	104	112	91
32.2992	81	84	99	84
32.3992	110	104	96	83
32.4991	112	112	123	82
32.5991	100	108	115	115
32.699	112	102	86	91
32.799	114	119	99	104
32.899	98	102	113	86
32.9989	87	114	90	102
33.0989	105	120	104	91
33.1989	115	109	125	93
33.2988	117	109	125	98
33.3988	103	116	101	98
33.4988	121	107	106	112
33.5987	102	104	110	91
33.6987	116	125	118	107
33.7987	101	114	96	103
33.8986	95	116	101	112
33.9986	101	107	104	124
34.0985	108	112	86	95
34.1985	114	105	103	126
34.2985	108	112	133	123
34.3984	118	98	124	135
34.4984	107	132	104	124
34.5984	126	115	103	133
34.6983	122	125	115	114
34.7983	149	143	131	132
34.8983	146	137	146	142
34.9982	134	147	147	155
35.0982	148	135	136	160
35.1982	154	120	131	152
35.2981	151	135	116	125
35.3981	120	122	138	120
35.4981	97	139	106	142
35.598	122	154	140	130
35.698	143	111	123	114
35.7979	140	119	152	138
35.8979	119	136	144	138
35.9979	140	161	157	143
36.0978	158	174	165	163
36.1978	230	307	175	180
36.2978	425	540	286	160
36.3977	784	696	519	284
36.4977	939	730	662	528
36.5977	973	812	674	769
36.6976	940	758	738	910
36.7976	899	732	718	883
36.8976	795	680	658	855
36.9975	652	640	635	808
37.0975	478	478	560	721
37.1975	271	337	425	635
37.2974	136	142	203	490
37.3974	105	107	111	303
37.4973	96	98	91	163
37.5973	77	99	99	130
37.6973	96	97	103	93
37.7972	104	88	72	83
37.8972	81	81	97	71
37.9972	84	79	80	87
38.0971	103	86	70	78
38.1971	66	78	83	71
38.2971	73	90	76	66
38.397	89	109	75	87
38.497	109	94	90	88
38.597	93	90	81	79
38.6969	113	71	83	67
38.7969	103	78	76	77
38.8968	76	80	63	58
38.9968	82	81	69	70
39.0968	73	76	61	53
39.1967	70	68	73	61
39.2967	44	93	80	63
39.3967	75	75	64	63
39.4966	75	64	82	63
39.5966	75	82	69	82
39.6966	78	66	94	57
39.7965	49	78	74	73
39.8965	77	96	74	80
39.9965	90	82	92	66
40.0964	98	88	77	61
40.1964	87	61	80	70
40.2964	86	83	65	57
40.3963	79	57	66	66
40.4963	60	70	64	54
40.5962	58	75	52	57
40.6962	55	77	53	45
40.7962	60	79	62	53
40.8961	59	57	54	62
40.9961	48	61	65	54
41.0961	78	64	56	56
41.196	63	59	50	42
41.296	57	52	58	47
41.396	56	73	55	49
41.4959	47	60	57	47
41.5959	43	57	56	55
41.6959	68	50	53	61
41.7958	44	66	58	62
41.8958	68	62	60	44
41.9958	63	58	59	50
42.0957	62	49	62	74
42.1957	74	61	59	76
42.2956	90	77	88	61
42.3956	84	83	81	114
42.4956	85	72	62	109
42.5955	96	74	74	47
42.6955	74	53	80	60
42.7955	67	53	56	57
42.8954	56	67	65	53
42.9954	59	48	54	69
43.0954	54	59	52	56
43.1953	66	52	47	53
43.2953	58	63	59	69
43.3953	66	64	56	63
43.4952	63	74	50	68
43.5952	72	81	74	74
43.6952	88	75	79	63
43.7951	85	54	71	63
43.8951	79	55	70	55
43.995	60	53	52	61
44.095	53	50	48	47
44.195	57	46	45	47
44.2949	58	67	48	43
44.3949	53	56	49	59
44.4949	56	50	57	46
44.5948	58	58	48	40
44.6948	51	59	48	50
44.7948	42	51	49	55
44.8947	51	46	45	44
44.9947	62	56	49	37
45.0947	55	60	54	37
45.1946	58	39	48	44
45.2946	45	45	59	49
45.3945	70	60	43	54
45.4945	56	64	53	71
45.5945	82	52	71	60
45.6944	57	68	55	40
45.7944	55	47	44	44
45.8944	47	37	51	39
45.9943	55	57	57	39
46.0943	46	48	43	40
46.1943	36	63	42	39
46.2942	51	47	44	44
46.3942	38	58	45	44
46.4942	54	49	50	34
46.5941	57	57	40	46
46.6941	44	40	38	35
46.7941	42	54	52	42
46.894	46	48	34	37
46.994	43	50	47	44
47.0939	52	42	52	47
47.1939	50	45	45	47
47.2939	55	36	43	56
47.3938	40	51	53	36
47.4938	34	53	48	34
47.5938	35	42	48	45
47.6937	43	50	51	35
47.7937	41	50	44	37
47.8937	44	40	43	29
47.9936	40	51	49	38
48.0936	43	54	40	46
48.1936	48	45	48	51
48.2935	53	55	50	48
48.3935	56	54	61	51
48.4935	56	66	54	67
48.5934	59	66	74	60
48.6934	72	65	75	78
48.7933	81	58	51	48
48.8933	53	53	52	45
48.9933	44	51	41	44
49.0932	61	44	47	55
49.1932	40	53	45	32
49.2932	40	51	41	32
49.3931	40	51	31	40
49.4931	50	48	63	48
49.5931	37	50	46	48
49.693	54	44	56	49
49.793	45	42	54	54
49.893	55	63	75	46
49.9929	45	69	44	54
50.0929	54	53	81	63
50.1928	63	58	60	58
50.2928	93	45	56	78
50.3928	74	62	54	62
50.4927	65	45	47	52
50.5927	63	50	45	48
50.6927	55	57	44	60
50.7926	34	56	46	49
50.8926	56	55	57	40
50.9926	34	37	48	58
51.0925	46	62	57	53
51.1925	40	44	45	51
51.2925	47	41	51	52
51.3924	57	49	41	51
51.4924	55	42	35	63
51.5924	47	47	51	55
51.6923	51	59	43	64
51.7923	61	52	55	58
51.8922	59	73	52	56
51.9922	62	72	69	62
52.0922	68	59	61	66
52.1921	60	79	76	61
52.2921	79	107	79	59
52.3921	108	121	117	82
52.492	119	147	129	102
52.592	111	133	139	130
52.692	122	130	139	155
52.7919	103	140	144	167
52.8919	110	146	154	157
52.9919	112	122	136	167
53.0918	98	129	140	170
53.1918	114	106	124	150
53.2918	106	124	139	173
53.3917	87	117	115	148
53.4917	78	83	95	155
53.5916	60	82	84	132
53.6916	52	54	57	97
53.7916	55	65	61	80
53.8915	57	69	53	73
53.9915	47	49	51	61
54.0915	42	50	38	58
54.1914	41	60	43	50
54.2914	53	41	51	42
54.3914	36	44	50	42
54.4913	38	61	42	54
54.5913	36	43	49	40
54.6913	44	42	42	52
54.7912	43	55	47	39
54.8912	42	59	41	42
54.9911	41	53	47	50
55.0911	48	43	46	48
55.1911	40	54	42	39
55.291	46	55	54	33
55.391	41	44	51	37
55.491	35	43	26	46
55.5909	54	54	41	44
55.6909	45	62	44	45
55.7909	47	54	48	41
55.8908	51	44	53	49
55.9908	51	52	45	43
56.0908	45	46	51	61
56.1907	42	51	40	47
56.2907	40	67	55	30
56.3907	27	40	48	46
56.4906	50	38	40	39
56.5906	51	48	32	39
56.6905	40	42	48	44
56.7905	38	52	45	43
56.8905	44	47	34	22
56.9904	42	50	44	48
57.0904	46	43	41	35
57.1904	53	57	44	43
57.2903	45	67	39	43
57.3903	53	38	47	49
57.4903	35	52	34	40
57.5902	56	53	48	41
57.6902	36	52	61	36
57.7902	45	52	49	38
57.8901	39	55	45	54
57.9901	43	49	43	36
58.0901	45	47	46	44
58.19	48	51	56	35
58.29	40	44	41	41
58.3899	43	36	49	43
58.4899	37	57	50	44
58.5899	38	41	58	53
58.6898	38	60	43	46
58.7898	36	53	45	40
58.8898	41	47	36	44
58.9897	45	44	54	35
59.0897	55	54	46	52
59.1897	40	46	44	41
59.2896	41	46	46	44
59.3896	46	45	49	41
59.4896	40	29	36	58
59.5895	55	50	55	52
59.6895	44	40	58	45
59.7895	41	48	30	36
59.8894	50	59	43	38
59.9894	53	45	43	42
60.0893	50	52	38	48
60.1893	52	46	38	45
60.2893	47	43	56	36
60.3892	47	30	66	50
60.4892	41	55	47	65
60.5892	49	50	42	42
60.6891	37	56	47	36
60.7891	41	51	49	51
60.8891	46	61	41	49
60.989	65	48	46	44
61.089	40	42	52	38
61.189	50	59	45	48
61.2889	52	57	48	42
61.3889	47	57	57	49
61.4888	68	55	55	49
61.5888	61	50	63	67
61.6888	72	64	62	56
61.7887	64	47	59	47
61.8887	58	56	36	41
61.9887	46	55	59	38
62.0886	47	55	55	43
62.1886	53	50	44	36
62.2886	57	69	55	56
62.3885	63	61	57	55
62.4885	77	55	85	54
62.5885	77	63	55	49
62.6884	63	64	55	42
62.7884	70	60	64	65
62.8884	69	65	60	51
62.9883	62	73	63	55
63.0883	57	71	66	59
63.1882	56	64	58	59
63.2882	66	71	59	55
63.3882	58	48	67	58
63.4881	62	55	76	68
63.5881	61	65	61	63
63.6881	51	67	59	59
63.788	64	80	69	67
63.888	50	70	68	82
63.988	56	56	55	56
64.0879	60	58	38	55
64.1879	62	51	71	50
64.2879	66	57	53	63
64.3878	66	48	68	42
64.4878	58	47	66	53
64.5878	48	41	54	46
64.6877	44	42	53	46
64.7877	48	55	46	54
64.8876	35	43	49	52
64.9876	62	47	42	56
65.0876	43	63	48	49
65.1875	43	50	43	40
65.2875	60	56	55	62
65.3875	53	57	45	50
65.4874	66	72	64	58
65.5874	57	62	64	46
65.6874	58	55	51	61
65.7873	61	66	46	43
65.8873	57	47	63	51
65.9873	52	57	46	56
66.0872	47	54	56	49
66.1872	41	59	64	60
66.2871	54	74	78	60
66.3871	47	60	67	49
66.4871	71	63	59	55
66.587	50	55	51	68
66.687	66	63	64	45
66.787	71	54	55	52
66.8869	64	60	53	57
66.9869	68	56	54	47
67.0869	62	69	61	52
67.1868	62	46	45	48
67.2868	59	45	46	53
67.3868	60	50	53	46
67.4867	52	55	56	46
67.5867	56	46	50	64
67.6867	58	60	51	43
67.7866	58	55	52	49
67.8866	51	66	56	57
67.9865	51	58	48	44
68.0865	46	63	63	43
68.1865	59	67	63	46
68.2864	59	69	63	57
68.3864	57	64	50	48
68.4864	63	60	57	62
68.5863	77	60	50	70
68.6863	57	54	49	65
68.7863	58	64	54	49
68.8862	64	67	62	54
68.9862	51	71	73	53
69.0862	50	78	64	64
69.1861	69	57	67	49
69.2861	55	59	54	78
69.3861	57	67	52	58
69.486	61	57	62	65
69.586	67	67	61	65
69.6859	62	59	66	72
69.7859	79	58	54	63
69.8859	45	57	54	68
69.9858	54	49	52	71
70.0858	47	75	60	73
70.1858	63	72	73	58
70.2857	50	55	63	76
70.3857	58	55	64	72
70.4857	57	57	62	68
70.5856	47	54	58	48
70.6856	59	57	53	68
70.7856	45	56	70	67
70.8855	50	80	59	60
70.9855	67	65	54	72
71.0855	48	56	57	70
71.1854	54	60	46	75
71.2854	60	66	73	75
71.3853	68	51	56	73
71.4853	62	69	47	53
71.5853	57	77	72	56
71.6852	49	52	74	69
71.7852	70	59	53	63
71.8852	70	55	43	47
71.9851	53	61	52	56
72.0851	65	47	73	49
72.1851	55	47	68	50
72.285	56	60	60	60
72.385	56	60	45	61
72.485	58	72	70	56
72.5849	42	76	63	46
72.6849	58	62	60	65
72.7848	56	62	55	43
72.8848	54	63	58	41
72.9848	48	53	60	62
73.0847	46	55	50	38
73.1847	71	61	61	49
73.2847	49	68	50	47
73.3846	58	59	49	58
73.4846	61	54	54	33
73.5846	46	59	45	52
73.6845	45	61	62	54
73.7845	49	49	42	43
73.8845	54	45	51	47
73.9844	65	54	72	46
74.0844	60	73	59	47
74.1844	47	56	65	45
74.2843	49	55	53	51
74.3843	65	41	48	57
74.4842	38	50	60	45
74.5842	50	54	53	55
74.6842	50	59	53	53
74.7841	46	53	40	48
74.8841	47	45	50	53
74.9841	53	59	52	39
75.084	66	51	58	54
75.184	72	55	50	56
75.284	71	57	53	55
75.3839	60	54	49	54
75.4839	40	50	47	66
75.5839	63	62	61	62
75.6838	63	61	51	67
75.7838	30	52	40	55
75.8838	50	43	53	61
75.9837	52	53	55	64
76.0837	48	55	50	78
76.1836	50	59	54	67
76.2836	55	61	49	64
76.3836	49	63	41	58
76.4835	52	46	47	75
76.5835	51	36	54	81
76.6835	63	49	44	77
76.7834	54	51	45	49
76.8834	31	49	42	60
76.9834	33	47	47	69
77.0833	40	47	54	61
77.1833	37	47	49	59
77.2833	51	49	43	49
77.3832	40	45	51	62
77.4832	42	49	40	49
77.5831	50	44	45	41
77.6831	43	46	44	72
77.7831	54	53	43	57
77.883	38	46	34	50
77.983	52	45	38	56
78.083	43	56	46	42
78.1829	44	37	30	46
78.2829	52	43	32	47
78.3829	37	48	38	55
78.4828	45	36	41	46
78.5828	41	42	52	41
78.6828	33	51	38	43
78.7827	43	38	46	41
78.8827	45	38	40	42
78.9827	42	25	39	43
79.0826	23	44	44	34
79.1826	41	42	27	40
79.2825	40	32	29	42
79.3825	50	25	33	34
79.4825	35	42	38	29
79.5824	35	27	40	34
79.6824	37	28	36	29
79.7824	46	44	37	34
79.8823	35	33	34	35
79.9823	40	39	38	25